Lounges 2024 Karlsruhe
Fachvortrag
Erhöhung von Prozessausbeute und -sicherheit in Reinräumen
Enhancing process yield and safety in cleanrooms
Vortrag wird aufgezeichnet!
Vortrag wird aufgezeichnet!
The topic of this presentation is the influence of Airborne Molecular Contamination (AMC) on process safety and yield. Cleanrooms are designed to maximize process flow and yield, while the tight conditions of the process window and the serviceability of the process equipment must be maintained. With strict cost and space optimization, AMC interferes with cleanroom design and production by risking yield reduction. When using customized solutions consisting of filter fan units (FFU), HEPA filters and molecular filters, the product yield can be increased in a targeted manner.
Referent*innen:
Manfred Zoermer