This presentation will showcase possible pathways to high-tech sustainable cleanrooms through circularity strategies. Systems are kept in loops through maintenance, reuse, and refurbishment, while unusable materials are either repurposed or transferred to external recycling facilities. Life cycle assessment (LCA) and environmental product declarations (EPDs) provide the scientific basis for evaluating environmental impacts, particularly the global warming potential (GWP) and CO2 emissions. The aim is to highlight innovative approaches to use resources more efficiently and reduce both environmental impacts and costs in the long term.