Barrier systems in accordance to VDI 2083 Part 16 are used in many technical areas, such as microelectronics. The main requirement here is the cleanliness of the room air.
A particular focus is on mini-environments, which serve as a technical solution for meeting the highest cleanliness requirements and offer many advantages. New technologies are also creating new requirements for a very dry environment.
In this context, technologies for dehumidification, such as condensation and adsorption drying, and their respective limits are discussed.
An energetic analysis of clean and dry rooms provides new perspectives on the challenges of such systems for production areas. Direct reference is made to disturbance variables such as humidity, process disturbances and contamination for people, processes and products.
Specific application scenarios are used to demonstrate the possibilities of mini-environments with very dry requirements. Finally, perspectives for expanding the use of mini-environments in new markets are outlined with regard to flexible, energy-saving and scalable solutions